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A compact model for early electromigration failures of copper dual-damascene interconnects.
R. L. de Orio
Hajdin Ceric
Siegfried Selberherr
Published in:
Microelectron. Reliab. (2011)
Keyphrases
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computational model
high level
experimental data
prior knowledge
management system
integrated circuit
cost function
probabilistic model
maximum likelihood
theoretical framework
mathematical model
conceptual model
sensitivity analysis
prediction model
object model