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Yuji Ohkubo
ORCID
Publication Activity (10 Years)
Years Active: 2024-2024
Publications (10 Years): 1
Top Topics
Thin Film
Result Quality
Si Sio
Integrated Circuit
Top Venues
Int. J. Autom. Technol.
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Publications
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Daisetsu Toh
,
Kodai Takeda
,
Kiyoto Kayao
,
Yuji Ohkubo
,
Kazuto Yamauchi
,
Yasuhisa Sano
High-Efficiency Polishing of Polymer Surface Using Catalyst-Referred Etching.
Int. J. Autom. Technol.
18 (2) (2024)