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Yoshihide Kihara
Publication Activity (10 Years)
Years Active: 2023-2023
Publications (10 Years): 1
Top Topics
Memory Space
High Speed
Manufacturing Process
Top Venues
VLSI Technology and Circuits
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Publications
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Yoshihide Kihara
,
Maju Tomura
,
Wataru Sakamoto
,
Masanobu Honda
,
Masayuki Kojima
Beyond 10 μm Depth Ultra-High Speed Etch Process with 84% Lower Carbon Footprint for Memory Channel Hole of 3D NAND Flash over 400 Layers.
VLSI Technology and Circuits
(2023)