Y. Mita

Publication Activity (10 Years)

Years Active: 2005-2005
Publications (10 Years): 0

Publications

Frédéric Marty, Lionel Rousseau, Bassam Saadany, B. Mercier, Olivier Français, Y. Mita, Tarik Bourouina
Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures. Microelectron. J. 36 (7) (2005)