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Xuanbo Chen
Publication Activity (10 Years)
Years Active: 2019-2019
Publications (10 Years): 1
Top Topics
Databases
Electron Beam Lithography
Optimization Methods
Artificial Intelligence
Top Venues
IEEE Trans. Computational Imaging
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Publications
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Xu Ma
,
Zhiqiang Wang
,
Xuanbo Chen
,
Yanqiu Li
,
Gonzalo R. Arce
Gradient-Based Source Mask Optimization for Extreme Ultraviolet Lithography.
IEEE Trans. Computational Imaging
5 (1) (2019)