Xiqiu Fan

Publication Activity (10 Years)

Years Active: 2006-2006
Publications (10 Years): 0

Publications

Xiqiu Fan, Honghai Zhang, Sheng Liu, Xiaofeng Hu, Ke Jia
NIL - a low-cost and high-throughput MEMS fabrication method compatible with IC manufacturing technology. Microelectron. J. 37 (2) (2006)