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NIL - a low-cost and high-throughput MEMS fabrication method compatible with IC manufacturing technology.
Xiqiu Fan
Honghai Zhang
Sheng Liu
Xiaofeng Hu
Ke Jia
Published in:
Microelectron. J. (2006)
Keyphrases
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optimization method
integrated circuit
response time
computational cost
evaluation method
manufacturing systems
detection method
clustering method
computationally efficient
data sets
experimental evaluation
dynamic programming
cost function
feature space
preprocessing
multiscale
image processing