Toshiyuki Sega

Publication Activity (10 Years)

Years Active: 2022-2022
Publications (10 Years): 1

Publications

Weishen Chu, Seyyed Ehsan Esfahani Rashidi, Yanli Zhang, Johann Alsmeier, Toshiyuki Sega
An Analytical Model for Thin Film Pattern-dependent Asymmetric Wafer Warpage Prediction. IMW (2022)