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Supika Mashiro
ORCID
Publication Activity (10 Years)
Years Active: 2024-2024
Publications (10 Years): 1
Top Topics
Single View
Semiconductor Devices
Electron Beam Lithography
Top Venues
Computer
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Publications
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Mark Neisser
,
Ndubuisi G. Orji
,
Harry J. Levinson
,
Umberto Celano
,
James Moyne
,
Supika Mashiro
,
Dan Wilcox
,
Slava Libman
How Lithography and Metrology Are Enabling Yield in the Next Generation of Semiconductor Patterning.
Computer
57 (1) (2024)