Sigeaki Saito

Publication Activity (10 Years)

Years Active: 2011-2011
Publications (10 Years): 0

Publications

Kosuke Kitaichi, Haruo Shimamoto, Chuichi Miyazaki, Yoshiyuki Abe, Sigeaki Saito, Shoji Yasunaga
Development of high accuracy wafer thinning and pickup technology for thin wafer. 3DIC (2011)