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Seung-Jae Moon
ORCID
Publication Activity (10 Years)
Years Active: 2024-2024
Publications (10 Years): 1
Top Topics
Rfid Reader
Plasma Etching
High Energy
Radio Frequency
Top Venues
Sensors
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Publications
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Jong-Jin Hwang
,
Hyo-Jun Sim
,
Seung-Jae Moon
Development and Evaluation of Ferrite Core Inductively Coupled Plasma Radio Frequency Ion Source for High-Current Ion Implanters in Semiconductor Applications.
Sensors
24 (15) (2024)