Scott D. Halle

Publication Activity (10 Years)

Years Active: 1999-1999
Publications (10 Years): 0

Publications

Michael Armacost, Peter D. Hoh, Richard Wise, Wendy Yan, Jeffrey J. Brown, John H. Keller, George A. Kaplita, Scott D. Halle, K. Paul Muller, Munir D. Naeem, Senthil Srinivasan, Hung Y. Ng, Martin Gutsche, Alois Gutmann, Bruno Spuler
Plasma-etching processes for ULSI semiconductor circuits. IBM J. Res. Dev. 43 (1) (1999)