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Sang Gil Ryu
Publication Activity (10 Years)
Years Active: 2019-2019
Publications (10 Years): 1
Top Topics
Grey Relation
Optimum Design
Top Venues
Robotics Comput. Integr. Manuf.
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Publications
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Changkyu Lee
,
Jae Woong Lee
,
Sang Gil Ryu
,
Je Hoon Oh
Optimum design of a large area, flexure based XYθ mask alignment stage for a 12-inch wafer using grey relation analysis.
Robotics Comput. Integr. Manuf.
58 (2019)