S. C. Hwee

Publication Activity (10 Years)

Years Active: 2005-2005
Publications (10 Years): 0

Publications

Grace Wang, S. Balakumar, S. C. Hwee, Rakesh Kumar, T. Hara
Enhancement of adhesion strength of Cu layer with low dielectric constant SiC: H liners in Cu interconnects. Microelectron. J. 36 (8) (2005)