Enhancement of adhesion strength of Cu layer with low dielectric constant SiC: H liners in Cu interconnects.

Grace WangS. BalakumarS. C. HweeRakesh KumarT. Hara
Published in: Microelectron. J. (2005)
Keyphrases
  • waveguide
  • dielectric constant
  • image processing
  • image enhancement
  • simulation software
  • feature vectors