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R. Stegink
Publication Activity (10 Years)
Years Active: 2016-2016
Publications (10 Years): 1
Top Topics
Integrated Circuit
Mechanical Properties
Web Services
Electron Microscopy
Top Venues
Microelectron. Reliab.
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Publications
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R. Stegink
,
Evan Liu
,
Manita Duangsang
Improved etching recipe for exposing Cu wire allowing reliable stitch pull.
Microelectron. Reliab.
64 (2016)