Matthias Koitzsch

Publication Activity (10 Years)

Years Active: 2011-2011
Publications (10 Years): 0

Publications

Andreas Mattes, Matthias Koitzsch, Dirk Lewke, Michael Müller-Zell, Martin Schellenberger
A virtual equipment as a test bench for evaluating virtual metrology algorithms. WSC (2011)
Matthias Koitzsch, Humbert Noll, Alexander Nemecek, Jochen Merhof, Markus Michl, Alfred Honold, Gerhard Kleineidam, Holger Lebrecht
Implementing virtual metrology into semiconductor production processes: an investment assessment. WSC (2011)