Implementing virtual metrology into semiconductor production processes: an investment assessment.
Matthias KoitzschHumbert NollAlexander NemecekJochen MerhofMarkus MichlAlfred HonoldGerhard KleineidamHolger LebrechtPublished in: WSC (2011)
Keyphrases
- production processes
- production process
- production line
- virtual environment
- virtual world
- augmented reality
- camera calibration
- process control
- semiconductor manufacturing
- production system
- assessment process
- virtual reality
- steady state
- virtual laboratories
- artificial intelligence
- quality assessment
- evolutionary algorithm
- expert systems
- e learning