Dirk Lewke

Publication Activity (10 Years)

Years Active: 2011-2016
Publications (10 Years): 1

Top Topics

Discrete Event Simulation

Optical Imaging

Semiconductor Manufacturing

Multi Component

Top Venues

Publications

M. De Biasio, M. Kraft, M. Roesner, C. Bergmann, M. Cerezuela-Barreto, Dirk Lewke, Martin Schellenberger
Direct optical stress sensing in semiconductor manufacturing using Raman micro-spectrometry. IEEE SENSORS (2016)
Andreas Mattes, Matthias Koitzsch, Dirk Lewke, Michael Müller-Zell, Martin Schellenberger
A virtual equipment as a test bench for evaluating virtual metrology algorithms. WSC (2011)