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Direct optical stress sensing in semiconductor manufacturing using Raman micro-spectrometry.
M. De Biasio
M. Kraft
M. Roesner
C. Bergmann
M. Cerezuela-Barreto
Dirk Lewke
Martin Schellenberger
Published in:
IEEE SENSORS (2016)
Keyphrases
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semiconductor manufacturing
discrete event simulation
process control
multi component
production system
sensor networks
image sensor
databases
decision trees
case study
three dimensional
sensor fusion
fiber optic
optical imaging