Matthew Tom

Publication Activity (10 Years)

Years Active: 2022-2023
Publications (10 Years): 4

Top Topics

Abstraction Layer

Computational Fluid Dynamics

Patient Specific

Top Venues

Comput. Chem. Eng.

Publications

Matthew Tom, Henrik Wang, Feiyang Ou, Sungil Yun, Gerassimos Orkoulas, Panagiotis D. Christofides
Computational fluid dynamics modeling of a discrete feed atomic layer deposition reactor: Application to reactor design and operation. Comput. Chem. Eng. 178 (2023)
Sungil Yun, Matthew Tom, Gerassimos Orkoulas, Panagiotis D. Christofides
Multiscale computational fluid dynamics modeling of spatial thermal atomic layer etching. Comput. Chem. Eng. 163 (2022)
Matthew Tom, Sungil Yun, Henrik Wang, Feiyang Ou, Gerassimos Orkoulas, Panagiotis D. Christofides
Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor. Comput. Chem. Eng. 168 (2022)
Sungil Yun, Matthew Tom, Feiyang Ou, Gerassimos Orkoulas, Panagiotis D. Christofides
Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration design. Comput. Chem. Eng. 161 (2022)