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Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration design.
Sungil Yun
Matthew Tom
Feiyang Ou
Gerassimos Orkoulas
Panagiotis D. Christofides
Published in:
Comput. Chem. Eng. (2022)
Keyphrases
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multiscale
computational fluid dynamics
design process
image processing
abstraction layer
numerical simulations
databases
theoretical analysis