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Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration design.

Sungil YunMatthew TomFeiyang OuGerassimos OrkoulasPanagiotis D. Christofides
Published in: Comput. Chem. Eng. (2022)
Keyphrases
  • multiscale
  • computational fluid dynamics
  • design process
  • image processing
  • abstraction layer
  • numerical simulations
  • databases
  • theoretical analysis