Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor.
Matthew TomSungil YunHenrik WangFeiyang OuGerassimos OrkoulasPanagiotis D. ChristofidesPublished in: Comput. Chem. Eng. (2022)
Keyphrases
- machine learning
- control method
- computer vision
- decision trees
- neural network
- real time
- genetic algorithm
- multi layer
- control strategy
- spatial databases
- machine learning methods
- spatial data
- text mining
- control system
- spatio temporal
- data analysis
- computer science
- pattern recognition
- feature selection
- artificial intelligence
- data mining