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Martin van den Brink
Publication Activity (10 Years)
Years Active: 2013-2022
Publications (10 Years): 1
Top Topics
Semiconductor Manufacturing
Electron Beam
Discrete Event Simulation
Success Or Failure
Top Venues
ISSCC
VLSI Technology and Circuits
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Publications
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Martin van den Brink
,
Anthony Yen
,
Paul van Wijnen
,
Michael Lercel
,
Boudewijn Sluijk
Holistic Patterning to Advance Semiconductor Manufacturing in the 2020s and Beyond.
VLSI Technology and Circuits
(2022)
Martin van den Brink
Continuing to shrink: Next-generation lithography - Progress and prospects.
ISSCC
(2013)