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Holistic Patterning to Advance Semiconductor Manufacturing in the 2020s and Beyond.

Martin van den BrinkAnthony YenPaul van WijnenMichael LercelBoudewijn Sluijk
Published in: VLSI Technology and Circuits (2022)
Keyphrases
  • semiconductor manufacturing
  • discrete event simulation
  • process control
  • production system
  • control system
  • artificial intelligence
  • integrated circuit
  • dynamical systems
  • production line