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Holistic Patterning to Advance Semiconductor Manufacturing in the 2020s and Beyond.
Martin van den Brink
Anthony Yen
Paul van Wijnen
Michael Lercel
Boudewijn Sluijk
Published in:
VLSI Technology and Circuits (2022)
Keyphrases
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semiconductor manufacturing
discrete event simulation
process control
production system
control system
artificial intelligence
integrated circuit
dynamical systems
production line