M. Zen

Publication Activity (10 Years)

Years Active: 2006-2011
Publications (10 Years): 0

Publications

Ravindra Mukhiya, Alvise Bagolini, T. K. Bhattacharyya, Leandro Lorenzelli, M. Zen
Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25 wt% TMAH. Microelectron. J. 42 (1) (2011)
Subhadeep Kal, A. Bagolini, B. Margesin, M. Zen
Stress and resistivity analysis of electrodeposited gold films for MEMS application. Microelectron. J. 37 (11) (2006)