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Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25 wt% TMAH.
Ravindra Mukhiya
Alvise Bagolini
T. K. Bhattacharyya
Leandro Lorenzelli
M. Zen
Published in:
Microelectron. J. (2011)
Keyphrases
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experimental study
experimental evaluation
statistical analysis
structural analysis
genetic algorithm
artificial intelligence
multiscale
data analysis