M. Nichterwitz

Publication Activity (10 Years)

Years Active: 2001-2001
Publications (10 Years): 0

Publications

D. Weber, F. Höhnsdorf, A. Hausmann, A. Klipp, Z. Stavreva, J. Herrmann, L. Bauch, M. Junack, H. Neef, M. Nichterwitz, S. Finsterbusch
ILD by low k materials into AlCu RIE metallization. Microelectron. Reliab. 41 (7) (2001)