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ILD by low k materials into AlCu RIE metallization.

D. WeberF. HöhnsdorfA. HausmannA. KlippZ. StavrevaJ. HerrmannL. BauchM. JunackH. NeefM. NichterwitzS. Finsterbusch
Published in: Microelectron. Reliab. (2001)
Keyphrases
  • artificial neural networks
  • high levels
  • databases
  • artificial intelligence
  • decision trees
  • three dimensional
  • learning materials
  • significantly lower
  • materials science