L. D. Roth

Publication Activity (10 Years)

Years Active: 1985-1985
Publications (10 Years): 0

Publications

Ching-Chung Li, J. F. Mancuso, David B. Shu, Yung-Nien Sun, L. D. Roth
A preliminary study of automated inspection of VLSI resist patterns. ICRA (1985)