A preliminary study of automated inspection of VLSI resist patterns.

Ching-Chung Li J. F. Mancuso David B. Shu Yung-Nien Sun L. D. Roth

Published in: ICRA (1985)

Keyphrases

high speed
pattern mining
vlsi circuits
signal processing
machine learning
social networks
image processing
database systems
data structure
design patterns
emerging patterns