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Kangtaek Lee
ORCID
Publication Activity (10 Years)
Years Active: 2007-2007
Publications (10 Years): 0
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Publications
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Hyun-Kyu Ryu
,
Yil-Wook Kim
,
Kangtaek Lee
,
Chee Burm Shin
,
Chang-Koo Kim
A comparative study on a high aspect ratio contact hole etching in UFC- and PFC-containing plasmas.
Microelectron. J.
38 (1) (2007)