Janusz H. C. Sedlacek

Publication Activity (10 Years)

Years Active: 1997-1997
Publications (10 Years): 0

Publications

Mordechai Rothschild, Anthony R. Forte, Roderick R. Kunz, Susan C. Palmateer, Janusz H. C. Sedlacek
Lithography at a wavelength of 193 nm. IBM J. Res. Dev. 41 (1&2) (1997)