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J. Tracy Weed
Publication Activity (10 Years)
Years Active: 1997-2008
Publications (10 Years): 0
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Publications
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S. Turnoy
,
Peter Wintermayr
,
Robert C. Aitken
,
Rudy Lauwereins
,
J. Tracy Weed
,
V. Kiefer
,
J. Hartmann
Panel Session - Caution Ahead: The Road to Design and Manufacturing at 32 and 22 nm.
DATE
(2008)
Russell A. Budd
,
Derek B. Dove
,
John L. Staples
,
Ronald M. Martino
,
Richard A. Ferguson
,
J. Tracy Weed
Development and application of a new tool for lithographic mask evaluation, the stepper equivalent Aerial Image Measurement System, AIMS.
IBM J. Res. Dev.
41 (1&2) (1997)