Richard A. Ferguson

Publication Activity (10 Years)

Years Active: 1997-1997
Publications (10 Years): 0

Publications

Russell A. Budd, Derek B. Dove, John L. Staples, Ronald M. Martino, Richard A. Ferguson, J. Tracy Weed
Development and application of a new tool for lithographic mask evaluation, the stepper equivalent Aerial Image Measurement System, AIMS. IBM J. Res. Dev. 41 (1&2) (1997)