Heinz-Ulrich Scheunemann

Publication Activity (10 Years)

Years Active: 2003-2003
Publications (10 Years): 0

Publications

Martin Bednarzik, Heinz-Ulrich Scheunemann, Alexander Barth, Daniel Schondelmaier, Bernd Loechel
First Results in Patterning of Ultra High Aspect Ratio Microstructures by a 4T Wave Length Shifter at BESSY. ICMENS (2003)
Linke Jian, Bernd Loechel, Heinz-Ulrich Scheunemann, Martin Bednarzik, Yohannes M. Desta, Jost Goettert
Fabrication of Ultra Thick, Ultra High Aspect Ratio Microcomponents by Deep and Ultra Deep X-Ray Lithography. ICMENS (2003)