Gen-Wen Hsieh

Publication Activity (10 Years)

Years Active: 2005-2005
Publications (10 Years): 0

Publications

Gen-Wen Hsieh, Ching-Hsiang Tsai, Wei-Chih Lin
Anodic bonding of glass and silicon wafers with an intermediate silicon nitride film and its application to batch fabrication of SPM tip arrays. Microelectron. J. 36 (7) (2005)