G. Z. Yan

Publication Activity (10 Years)

Years Active: 2010-2011
Publications (10 Years): 0

Publications

Liang Qian, P. Z. Hong, L. N. Sun, Z. C. Yang, G. Z. Yan
CMOS compatible process for suspended high-aspect-ratio integrated silicon microstructures. NEMS (2011)
L. N. Sun, L. Qian, P. Z. Hong, G. Z. Yan, Z. C. Yang
Post CMOS integration of high aspect ratio SOI MEMS devices. NEMS (2011)
Y. M. Wei, X. Mao, Z. C. Yang, G. Z. Yan
A single mask dry releasing process for making high aspect ratio soimemsdevices. NEMS (2010)
L. N. Sun, T. M. H. Lee, Z. C. Yang, G. Z. Yan
Fabrication of Sub-100-nm silicon nanowire devices on SOI wafer by CMOS compatible fabrication process. NEMS (2010)