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P. Z. Hong
Publication Activity (10 Years)
Years Active: 2011-2011
Publications (10 Years): 0
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Publications
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Liang Qian
,
P. Z. Hong
,
L. N. Sun
,
Z. C. Yang
,
G. Z. Yan
CMOS compatible process for suspended high-aspect-ratio integrated silicon microstructures.
NEMS
(2011)
L. N. Sun
,
L. Qian
,
P. Z. Hong
,
G. Z. Yan
,
Z. C. Yang
Post CMOS integration of high aspect ratio SOI MEMS devices.
NEMS
(2011)