Login / Signup
Eungchul Kim
Publication Activity (10 Years)
Years Active: 2019-2021
Publications (10 Years): 2
Top Topics
Mechanical Design
Sensor Fusion
Spatial Distribution
Condition Monitoring
Top Venues
MetroInd4.0&IoT
</>
Publications
</>
Eungchul Kim
,
Seungjun Oh
,
Taesung Kim
Development of Eddy Current Sensor for Measuring Thickness of Copper Wafer in sub-Micron Scale.
MetroInd4.0&IoT
(2021)
Eungchul Kim
,
Gunhoo Woo
,
Taesung Kim
In-situ Monitoring Hydrodynamic Pressure Distribution during Chemical Mechanical Polishing.
MetroInd4.0&IoT
(2019)