Development of Eddy Current Sensor for Measuring Thickness of Copper Wafer in sub-Micron Scale.

Eungchul Kim Seungjun Oh Taesung Kim

Published in: MetroInd4.0&IoT (2021)

Keyphrases

eddy current
real time
data acquisition
data sets
sensor networks
scale space
sensor fusion
neural network
knowledge base
case study
design principles
massively parallel