Eric L. Garfunkel

Publication Activity (10 Years)

Years Active: 1999-1999
Publications (10 Years): 0

Publications

Evgeni P. Gusev, Hsu-Chang Lu, Eric L. Garfunkel, Torgny Gustafsson, Martin L. Green
Growth and characterization of ultrathin nitrided silicon oxide films. IBM J. Res. Dev. 43 (3) (1999)