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E. Bertagnolli
Publication Activity (10 Years)
Years Active: 2005-2005
Publications (10 Years): 0
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Publications
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Michael Nelhiebel
,
J. Wissenwasser
,
Thomas Detzel
,
A. Timmerer
,
E. Bertagnolli
Hydrogen-related influence of the metallization stack on characteristics and reliability of a trench gate oxide.
Microelectron. Reliab.
45 (9-11) (2005)