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D. Ekeom
Publication Activity (10 Years)
Years Active: 2013-2013
Publications (10 Years): 0
Top Topics
Electronic Devices
D Objects
Silicon Dioxide
High End
Top Venues
IWASI
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Publications
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J. Esteves
,
Libor Rufer
,
S. Basrour
,
D. Ekeom
CMOS-MEMS technology with front-end surface etching of sacrificial SiO2 dedicated for acoustic devices.
IWASI
(2013)