B. Dietrich

Publication Activity (10 Years)

Years Active: 2001-2001
Publications (10 Years): 0

Publications

Kai F. Dombrowski, B. Dietrich, Ingrid De Wolf, R. Rooyackers, G. Badenes
Investigation of stress in shallow trench isolation using UV micro-Raman spectroscopy. Microelectron. Reliab. 41 (4) (2001)