Atsushi Suyama

Publication Activity (10 Years)

Years Active: 2005-2005
Publications (10 Years): 0

Publications

Hideki Murakami, Wataru Mizubayashi, Hirokazu Yokoi, Atsushi Suyama, Seiichi Miyazaki
Electrical Characterization of Aluminum-Oxynitride Stacked Gate Dielectrics Prepared by a Layer-by-Layer Process of Chemical Vapor Deposition and Rapid Thermal Nitridation. IEICE Trans. Electron. (4) (2005)