Akio Misaka

Publication Activity (10 Years)

Years Active: 1993-1993
Publications (10 Years): 0

Publications

Kenji Harafuji, Akio Misaka, Noboru Nomura, Masahiro Kawamoto, Hirohiko Yamashita
A novel hierarchical approach for proximity effect correction in electron beam lithography. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 12 (10) (1993)