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A. Gushterov
Publication Activity (10 Years)
Years Active: 2006-2006
Publications (10 Years): 0
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Publications
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Anna Maria Szekeres
,
T. Nikolova
,
S. Simeonov
,
A. Gushterov
,
F. Hamelmann
,
U. Heinzmann
Plasma-assisted chemical vapor deposited silicon oxynitride as an alternative material for gate dielectric in MOS devices.
Microelectron. J.
37 (1) (2006)