A. Bonfiglietti

Publication Activity (10 Years)

Years Active: 2005-2005
Publications (10 Years): 0

Publications

A. Pecora, Luca Maiolo, A. Bonfiglietti, M. Cuscunà, F. Mecarini, Luigi Mariucci, Guglielmo Fortunato, N. D. Young
Silicon dioxide deposited by ECR-PECVD for low-temperature Si devices processing. Microelectron. Reliab. 45 (5-6) (2005)