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Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications.
Kihyun Kim
Yeonsu Lee
Ignacio Llamas-Garro
Jung-Mu Kim
Published in:
Sensors (2022)
Keyphrases
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sensor networks
integrated circuit
high density
control system
closed loop
sensor fusion
high speed
control method
real time
real world
genetic algorithm
artificial intelligence
computer vision
evolutionary algorithm
electric field
working principle